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Restrictive Flow Orifices

Create a precise flow at a specified inlet pressure
 Universal Microsystems
3350 Scott Blvd. Bldg. 47
Santa Clara, CA 95054
Tel: (408) 532-6604 Fax: (408) 727-4452
Restrictive flow orifices contain a precise orifice inside a leak tight stainless steel enclosure
resulting in an exact flow at a specified pressure.

Applications
> Limit catastrophic gas flow in the case of a line break or a stuck valve

> Backfill a chamber in a precise time

>Accurately split the flow into multiple gas streams

> Convert a pressure regulator/valve into an exact flow device
Length Female/Male fittings 1.80"

Custom lengths available

Diameter 3/4"

Wrench flats, 5/8"

CAD Drawing
To order, specify the gas species involved,
the inlet pressure and the desired flow rate.

SEE LINK BELOW
Specifications
 · Surface finish 5Ra, electopolish
 · Wetted parts, 316L stainless steel,
silicon, Viton (Kalrez available)
 · He leak check to 10-9atm sccm/sec
 · Maximum pressure, 200 psia
· Temperature range, 50 to 100 o F
APPLICATION DESIGN GUIDE
Limit catastrophic gas flow

Choose a Flow Control Filter with flow rating Qs = 2-3X the maximum regulated flow. Flow ratings can be found from the table on the Orders Page.
See Detailed Information 		Backfill a Chamber in a Precise Time

Assuming there is no loss of gas from the chamber during backfill, the time to fill to atmospheric pressure is given simply by: Time = V / Qs where V is the volume of the chamber.
See Detailed Information


To Specify Restrictive Flow Orifices

click here.
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