Serving the Semiconductor Industry since 1999
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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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3350 Scott Blvd. Bldg 47
Santa Clara, California 95054
Phone: 408-532-6604
Fax: 408-727-4452
E-mail Us
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Find a Silicon Orifice
knowing gas flow desired and inlet pressure
Download Orifice Calculator
Excel file v2.0
or follow steps below
Step 1
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Convert application gas flow (in sccm)
to N2 equivalent flow
Divide by the K factor (see table or extended list)
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Step 2
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Convert application pressure units
to P in psia
Add 14.7 to psig value
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Step 3
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Find the silicon orifice model number by matching the converted flow to the best value in the column for P
Note, if P isn't a table column convert to 20 Psig by multiplying flow by 34.7/P
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How to order Silicon orifices
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For quotes or additional information
E-mail Us
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