Serving the Semiconductor Industry since 1999
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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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3350 Scott Blvd. Bldg 47
Santa Clara, California 95054
Phone: 408-532-6604
Fax: 408-727-4452
E-mail Us
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Find an In-Stock Orifice Diameter
If you know the diameter of the orifice you're looking for
find it in the table below.
If you are not sure of the desired diameter
but you know the gas, its flow and the inlet pressure,
Download the orifice calculator
Excel file v2.0
or you can calculate the N2 flow for the diameter
using the 3 step procedure below.
Step 1
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Convert application gas flow (in sccm)
to N2equivalent flow
Divide by the K factor (see table or extended list)
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Step 2
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Convert application pressure units
to P in psia
Add 14.7 to psig value
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Step 3
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Multiply the flow at P by 34.7/P. This converts to the flow at 20 psig. Find the best match in the table below.
Note, orifice has a normal (N) or reverse (R) direction
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 Update 02/10
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Diameters up to .030" available. Flow scales with orifice area.
Order a U series tube restrictor,
$49 each plus $4.95 shipping
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Not in Stock?
Call 408-532-6604 for quotes or additional information,
or
E-mail Us
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