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Flow Control Filters

Point-of-Use Filters with a precise flow
at a specified inlet pressure
 Universal Microsystems
3350 Scott Blvd. Bldg. 47
Santa Clara, CA 95054
Tel: (408) 532-6604 Fax: (408) 727-4452
Flow Control Filters combine a sintered SS or Ni media filter with a precision flow orifice to create
a point-of-use filter with an exact flow at a specified pressure.

Applications > Limiting catastrophic gas flow in the case of a line break or a stuck valve

> Backfill a chamber with a particle free gas in a precise time
Industry standard lengths (3.31" & 2.80") for ease of retrofit
Custom lengths available

Ultraclean, 1 in. dia. filters

Various inlet/outlet fittings (photo)

CAD Drawing, 2.8"MF

CAD Drawing, 3.31
To order, specify the gas species involved, the inlet pressure and the desired flow rate.

SEE TABLE BELOW 		Specifications
  · No more than 1 particle/ft3
  · Less than 10 ppb THC
  · Less than 10 ppb moisture
  · He leak check to 10-9atm sccm/sec
  · 99.9999999 percent removal rating at rated flow
APPLICATION DESIGN GUIDE
Limit catastrophic gas flow

Choose a Flow Control Filter with flow rating Qs = 1.5X the maximum regulated flow. Flow ratings can be found from the table on the Orders Page.
See Detailed Information 		Backfill a Chamber in a Precise Time

Assuming there is no loss of gas from the chamber during backfill, the time to fill to atmospheric pressure is given simply by: Time = V / Qs where V is the volume of the chamber.
See Detailed Information


How to Specify Flow Contol Filters




To specify the flow control model # click here.
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