Serving the Semiconductor Industry since 1999
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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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3350 Scott Blvd.
Bldg. 47
Santa Clara, California 95054
Phone: 408-532-6604
Fax: 408-727-4452
E-mail Us
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Precison Flow Orifice Specifications
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> Surface finish, 10 or 5 Ra electropolish
> Wetted parts, 316L SS, silicon or sapphire,& Viton or PCTFE
> Seal: Viton or PCTFE (Kalrez & Teflon available)
> He leak check 10-9 atm-cc/sec
> Maximum pressure, 200 psia
> Temperature range, 50 to 250 oF
> Fittings, VCR, tube stub, Surface Mount
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Precision Flow Orifice Characteristics
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> Completely stable
> No Particle Generation
> Minimal dry down time
> Flow accuracy +/- 2 percent available
> Orifice will not clog like a filter
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