Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
3350 Scott Blvd. Bldg 47
Santa Clara, California 95054
Phone: 408-532-6604
Fax: 408-727-4452
E-mail Us

 
Precision Flow Orifices Simplify Mass Flow Control
Precision Flow Orifices from Universal Microsystems simplify many of the gas delivery systems used in the semiconductor industry. A knife edge orifice inside a leak tight, stainless steel enclosure, results in a very precise and repeatable flow from any fixed pressure source
Combination Male/Female
Fittings
Specifications 		Ultrapure filter with
built-in flow limiter
Specifications

           
 
Applications
Replacing MFCs in non-critical gas delivery situations
Saftey, limiting catastrophic flow in case of valve failure
Flow splitting, getting several lines of gas flow from a single MFC.
Backfill, a chamber in a precise time
 
Features
Custom surface labels. Choose:
      > Gas flow specifications
      > Your company's part #
      > UMS model # 		> Pressure based, orifice controlled, flow
> He leak check 10-9 atm-cm/sec
> 5 Ra surface finish
> Standard flow accuracy ± 5.0 percent
> NIST traceable,calibration
Universal Microsystems