Serving the Semiconductor Industry since 1999

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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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Universal Microsystems
47000 Warm Springs Blvd. Ste1#146
Fremont CA 94539
Purchase orders in CA
Ewald Associates
48531 Warm Springs Blvd.
Fremont CA 94539
Purchase orders outside CA
Banner Industries
One Industrial Drive
Danvers, MA 01923
  • We stock orifices with diameters from 0.0002" to 0.075"
  • We use SS orifices for diameters >0.030" designated by Fxx where xx is the diameter in 0.001" units
  • We use sapphire orifices for diameters between 0.003" and 0.030" designated either Nxx or Rxx
  • Nxx orifices have a beveled inlet shape while Rxx have a flat inlet
  • We use Si orifices with diameters between 0.0002" and 0.0100"   
  • Link to gas flow vs diameter

    Available Bodies and Prices
    VCR Unions

    1/4" M/M w Embossed part# & serial ID
    154$ Info

    1/4" M/M w Embossed orifice ID
    125$ Info

    1/4" M/F or F/M w Embossed part#
    159$ Info

    1/8" M/M w Embossed Orifice ID
    129$ info

    1/4" F/F w Embossed Orifice ID
    169$ Info

    1/4" tube 1.70" or 1.20" length
    w Embossed Orifice ID
  • Use any orifice with compression fittings
  • SS and sapphire orifices for welding

  • 1 1/8" Surface mount Sandwich
    1/4" thickness.
    Embossed Orifice ID & serial #

    Cut-off filters. Point-of-use 99.9999999%, filtration with built in restrictor. Limit overflow to specified value.
    Information-Cut-off Filter For additional filter information contact TEM Filter Co.

    Also, calibrated orifices
    for 1% accuracy flow source

    > Pricing requires CC, pre-paid, or COD
    > M/F and F/F are welded w He leak check 10-9 atm-cm/sec
    > 7 Ra surface finish
    > Restrictors ship 5.0 % flow specification
    > Calibration accuracy 1% @>100 sccm
    > Calibration accuracy from Primary Standards

    Universal Microsystems