Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
3350 Scott Blvd. Bldg 47
Santa Clara, California 95054
Phone: 408-532-6604
Fax: 408-727-4452
E-mail Us

 
Precision Flow Orifices Simplify Mass Flow Control
Precision Flow Orifices from Universal Microsystems simplify many of the gas delivery systems used in the semiconductor industry. A precise orifice inside a leak tight, stainless steel enclosure, results in a very precise and repeatable flow from any fixed pressure source

Download orifice calculator Excel file v2.0

Learn more:    Silicon Orifices      Sapphire Orifices      Restrictor Tubes



Restrictor Tubes
Order Info
Combination Male/Female
Fittings
Specifications
Ultrapure filter with
built-in flow limiter
Specifications
1/4" diameter, SS.

Custom lengths.

Suitable for welding or ferrule fittings.
           
G series body with flow arrow and orifice diameter stamp

Smaller overall length and lower cost M-M VCR alternative to B-series

Sapphire, silicon or SS orifices

Specifications 		       Now available
Sapphire Orifices

Chemically inert, robust orifice.

Available with diameters from .003" to .030" in .001" increments

     Find orifice diameter
                                          Applications
Replacing MFCs in non-critical gas delivery situations
Saftey, limiting catastrophic flow in case of valve failure
Flow splitting, getting several lines of gas flow from a single MFC.
Backfill, a chamber in a precise time
Features
Custom surface labels. Choose:
      > Gas flow specifications
      > Your company's part #
      > UMS model # 		> Pressure based, orifice controlled, flow
> He leak check 10-9 atm-cm/sec
> 5 Ra surface finish
> Standard flow accuracy ± 5.0 percent
> NIST traceable,calibration
For quotes or additional information E-mail Us
Universal Microsystems