Universal Microsystems Products
Product Information
Serving the Semiconductor Industry since 1999
408-828-1460
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Aztek Micro
High precision, VCR gasket restrictors for gas flow control and meter calibration
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Phone 408-828-1460
Click to email
Sales@flowrestrictor.com
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Verify flowmeter with insertable, reusable restrictor gasketKnow the inlet pressure know the flow +/- 1%Kel-f 1/4" gaskets with thru orifice and N2 flow measured vs inlet pressureAlso available with Sapphire orifices
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Kel-f gasket durability --- reassemble hundreds of times
Completely stable flow ----overtigtening metal gaskets can change flow considerably
 flow range available vs orifice diameter
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Verify MFM with insertable, reusable flow restrictor gasket
Gasket Information
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Notes
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> Restrictors ship ± 5.0 % flow specification > Calibration accuracy ± 1% @>100 sccm > Calibration accuracy from Primary Standards
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