Serving the Semiconductor Industry since 1999
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Aztek Micro
High precision, restrictive flow orifices for
gas flow control
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Phone: 408-828-1460
E-mail Us
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Orifice Restrictor vs Sintered Media Restrictor
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> Better flow repeatability +/- 1percent per lot
> Better Stability, no clogging
> Lower back pressure effect
> Less dry down time
> Accurate surrogate gas calibration
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Kel-f Gasket Orifice Restrictor vs. Metal Gasket
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> Doesn't wear out
- reassemble any number of times
> Completely stable flow
-over tightening metal gaskets can change flow considerably
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Replace an expensive MFC with a pressure regulator,
a valve and a precision flow orifice.
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> Stability & Repeatability 0.1percent vs. 0.2 percent
> Less seat leakage, 10-8 vs. 10-4 atm cc/sec
> Accurate surrogate gas calibration
> Multi-gas compatibility for each unit
> Lower cost, fewer system components
> Field interchangeable
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