Serving the Semiconductor Industry since 1999
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Universal Microsystems
High precision, restrictive flow orifices for gas flow control
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3350 Scott Blvd. Bldg 47 Santa Clara, California 95054 Phone: 408-532-6604 Fax: 408-727-4452
E-mail Us
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Find a Sapphire Orifice Diameter
knowing gas flow desired and inlet pressure
Download Orifice Calculator
Excel file v2.0
or follow steps below
Step 1
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Convert application gas flow (in sccm) to N2 equivalent flow Divide by the K factor (see table or extended list)
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Step 2
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Convert application pressure units to P in psia Add 14.7 to psig value
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Step 3
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Find the sapphire diameter by matching the converted flow to the best value in the column for P
Note, orifice has a normal (N) or reverse (R) direction
If P isn't a table column convert to 20 Psig by multiplying flow by 34.7/P
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Diameters up to .030" available. Flow scales with orifice area.
How to order Sapphire orifices
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For quotes or additional information
E-mail Us
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