Serving the Semiconductor Industry since 1999
Click here for detailed Schematics by model type
CAD Drawings
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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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3350 Scott Blvd. Bldg. 47
Santa Clara, California 95054
Phone: 408-532-6604
Fax: 408-727-4452
E-mail Us
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To order
E-mail us
or call 408-532-6604. Our office hours are 8:00AM until 5:00PM Pacific Time. Tell us what gas is involved, what are the inlet and outlet pressures and what fittings you need and we'll take it from there.
Our standard fittings are VCR compatible. The B series body with male/male fittings has an overall length of 1.55" (see photo above). The B-series body with a female fitting on either the outlet or the inlet is 1.80". For detailed dimensions see
Specifications
Alternative fittings, such as NPT and tube stubs, are readily available.
A shorter M/M VCR option is the G-series body.
G Series Specifications
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How to Specify B series flow restrictors
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Sapphire Orifices
are available with the B-body. Orifice diameters are .003" to .030" in .001" steps. See
Sapphire Orifices
The table below gives you the model number for the precision flow silicon orifice that will generate the indicated flow of N2 gas at the inlet pressure at the top. To convert N2 flow into the equivalent flow of a different gas, multiply by K which is given in Step by Step. K = (Mol. Wt. N2/ Mol. Wt. gas)l/2
To print this table
click here
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