Serving the Semiconductor Industry since 1999
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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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Phone: 408-727-1313
E-mail Us
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Precison Flow Orifice Specifications
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> Surface finish, 10 or 5 Ra electropolish
> Wetted parts, sapphire orifices: 316L SS & sapphire
> Wetted parts, silicon orifices: Viton or Kalrez & PCTFE
> He leak check 10-9 atm-cc/sec
> Maximum pressure, 200 psia
> Temperature range, 50 to 250 oF
> Fittings, VCR, tube stub, Surface Mount
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Precision Flow Orifice Characteristics
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> Completely stable
> No Particle Generation
> Minimal dry down time
> Flow accuracy +/- 2 percent available
> Orifice will not clog like a filter
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